Continuing downscaling of semiconductors devices brings new challenges for plasma etch and strip. New materials (high-k and low-k dielectrics, metal gates, phase-shift memories etc.) and new architectures (3D devices, channel-engineered devices etc.)  require new etch and strip approaches. We organize this workshop to bring together people from research institutions and industry to discuss new challenges in plasma etch and strip

Leuven has a long and rich history. Founded in the 9th century, it became an important trading centre during the middle ages. A very important event in that time was the foundation of its University in 1425.
For almost 6 centuries Leuven has been a centre of education and research; a tradition which is continued until today.
Walking through Leuven you will discover the many building that testimony its glorious past: its finely sculpted Gothic town hall, the 13th century beguinage, numerous historical University buildings scattered all over the town…
Another major event in Leuven’s history is the foundation in 1366 of the brewery “Van den Hoorn”. This brewery still exists today, changed name a couple of times, and today is known as “Inbev”, the world largest brewery.
The famous beer “Stella Artois” was born and still is brewed in Leuven.